Linear Interferometer
Laser Measurement System HPI-3D is the most advanced laser interferometer available on the market. Being 1 Hz two frequency heterodyne system, it offers plenty new options for users with unprecedented measurement precision and resolution. Really easy to use, it can be applied both in re- search laboratories as well as for machine geometry measurements.
Precise machine calibration is essential to provide quality products. With our system you can perform accurate calibration quickly and easily. Basic configuration enables measurements of linear displacement, vibrations, velocity and positioning. The 3D system offers the unique function of vertical and horizontal straight- ness measurement that are performed simultaneously with positioning.
Additionally, the HPI-3D soft- ware offers a unique electronic alignment tool. Thanks to this function the alignment be- comes fast and easy. Also, the cosine error influence is greatly reduced. Laser interferometer HPI-3D simplifies the measurements even further thanks to Bluetooth communication with PC and wireless sensors.
Laser Interferometer HPI-3D
Applications:
- The Positioning of CNC and CMM machines
- Machine geometry inspection
- Flatness measurements
- Axes parallelism measurement
- Vibration measurement
- Straightness measurement
- Squareness measurement
- Small angle measurement
- Angular positioning
- Ball screw inspection
- Dynamic measurements with a strobe
- Veriety of laboratory applications
Measurement Parameters
| Measurement Type |
Range |
Resolution |
Accuracy |
| Distance |
0 - 30 m |
100 pm |
0.4 µm/m |
| Velocity |
0 - 7 m/s |
0.25 µm/s |
± 0.1% |
| Angular * |
0 - 3600 arcsec |
0.01 arcsec |
± 0.01% * A ± 0.06 * L ± 0.1 µm* |
| Straightness Angular * |
0 - 25 m |
0.01 µm (for 100 mm base) |
± 0.01% * A ± 0.06 * L ± 0.1 µm* |
| Straightness Wollaston * |
0 - 9 m ± 30 mm |
0.01 µm |
± 5% * A µm ± 0.1 * |
| Straightness 3D * |
0 - 4 m |
0.1 µm |
±(5+5 * L) µm |
| Flatness * |
0 - 15 m ± 2 mm |
0.01 µm/m |
± 0.1 % * A ± 0.06 * L ± 0.1 µm * |
| Squareness * |
± 1000 arcsec |
0.01 µm |
± 1 arcsec * |
| Rotary * |
± n * 360° |
0.1 arcsec |
± 1 arcsec * |
L - the distance between optical components in (m)
A - measured value in (m)
* - with electronic adjustment
* - additional optics required
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